IC 009. US 021 023 026 036 038. G & S: Semiconductor manufacturing equipment, namely, cluster tools and sputtering devices; wafer cooling system comprised of a wafer platen, monitor and controller for use with ion implantation systems; ion accelerators; electron beam accelerators; and target chambers; sputter coating guns for use in coating substrates; leak detectors; automatic vacuum locks for introduction and removal of semiconductor wafers from semiconductor processing equipment; computer programs used for maintaining, troubleshooting, and repairing accelerators. FIRST USE: 19990419. FIRST USE IN COMMERCE: 19990419
IC 042. US 100 101. G & S: Technical consultation and testing in the field of semiconductor equipment. FIRST USE: 19990419. FIRST USE IN COMMERCE: 19990419
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