IC 009. US 021 023 026 036 038. G & S: Optical film thickness gauges and parts therefor for thin film forming devices; ion guns and parts therefor for thin film forming devices
IC 011. US 013 021 023 031 034. G & S: Dryers and ventilating exhaust fans used for the removal of solid, liquid and vapor contaminants in film generation chambers
IC 037. US 100 103 106. G & S: Repair or maintenance of vacuum thin film forming devices; repair or maintenance of ion guns; repair or maintenance of exhaust devices for film generation chambers; repair or maintenance of optical film thickness gauges
IC 042. US 100 101. G & S: Design, programming and maintenance of computer software for vacuum thin film forming device control systems; design, programming and maintenance of computer software for ion gun control systems; design, programming and maintenance of computer software for control systems of exhaust devices for film generation chambers; design, programming and maintenance of computer software for optical film thickness control systems
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