IC 009. US 021 023 026 036 038. G & S: Data processing equipment; computers and computer programmes for controlling and monitoring atomic scale layer deposition apparatus, namely, reactors and reactor systems consisting of several reactors, for collecting data from aforementioned atomic scale layer deposition apparatus, user interface software for aforementioned atomic scale layer deposition apparatus, computer software enabling aforementioned atomic scale layer deposition apparatus to interface and communicate with devices used in connection with aforementioned atomic scale layer deposition apparatus, computer software for controlling and monitoring devices used in connection with aforementioned atomic scale layer deposition apparatus
IC 040. US 100 103 106. G & S: Treatment and coating of materials by atomic scale layer deposition method and consulting connected thereto
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