IC 037. US 100 103 106. G & S: installation and maintenance of machines, apparatus and instruments, and systems composed thereof, for expitaxial layer deposition and/or thermal treatment of substrates, semi-conductor substrates, silicon discs and wafers for semi-conductor chip manufacturing
(CANCELLED) IC 042. US 100 101. G & S: [ Development of machines, apparatus and instruments, and systems composed thereof, for expitaxial layer deposition and/or thermal treatment of substrates, semi-conductor substrates, silicon discs and wafers for semi-conductor chip manufacturing ]
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