IC 009. US 021 023 026 036 038. G & S: Machines and precise mechanical apparatus for the production, processing and testing of electronic, micro mechanic and optical components; coating machines for the production, processing and testing of electronic, micro mechanic and optical components, in particular spin coater and spray coater; bonding devices for the production, processing and testing of electronic, micro mechanic and optical components; mask alignment apparatus for the production, processing and testing of electronic, micro mechanic and optical components; computer software for use in the production, processing and testing of electronic, micro mechanic and optical components
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